Our recent paper “Nanoscale piezoelectric surface modulation for adaptive extreme ultraviolet and soft x-ray optics” is now available online. In this work, we report fabrication of a piezoelectric based functional actuator with gradual surface modulation intended for wavefront correction at extreme ultraviolet (XUV) and soft x-ray (SXR) wavelengths for the first time.
Abstract: Extreme ultraviolet and soft x-ray wavelengths have ever-increasing applications in photolithography, imaging, and spectroscopy. Adaptive schemes for wavefront correction at such a short wavelength range have recently gained much attention. In this Letter we report, to the best of our knowledge, the first demonstration of a functional actuator based on piezoelectric thin films. We introduce a new approach that allows producing a gradually varying surface deformation. White light interferometery is used to show the level of control in generating arbitrary surface profiles at the nanoscale.