Current research

February 2017 – Current

My current research concerns smart interactive optics for lithography at extreme ultraviolet (EUV) wavelengths (project name: SMILE). We fabricate piezoelectric thin films and actuators, and study the underlying physics to incorporate them in the EUV multilayer mirrors in order to perform wavefront corrections. For this work, I have direct contact and collaboration with the partners at Carl ZEISS SMT and Solmates B. V.

Read more details about the SMILE project in this page.