February 2017 – Current
My current research concerns smart interactive optics for lithography at extreme ultraviolet (EUV) wavelengths (project name: SMILE). We fabricate piezoelectric thin films and actuators, and study the underlying physics to incorporate them in the EUV multilayer mirrors in order to perform wavefront corrections. For this work, we have direct contact and collaboration with the partners at Carl ZEISS SMT and Solmates B. V.
Update: Our recent paper titled “Nanoscale piezoelectric surface modulation for adaptive extreme ultraviolet and soft x-ray optics” is now available online. In this work, we report fabrication of a piezoelectric based functional actuator with gradual surface modulation intended for wavefront correction at extreme ultraviolet (XUV) and soft x-ray (SXR) wavelengths for the first time.
Read more details about the SMILE project in this page.